MKS has designed and manufactured optical sub-systems for lithography, wafer inspection, excimer and EUV light source, metrology and mask writing applications, among others.

Apr 10, 2023 · Wafer surface defect detection plays an important role in controlling product quality in semiconductor manufacturing, which has become a research hotspot in computer vision. …

Apr 8, 2025 · Detecting macro-defects early in the wafer processing flow is vital for yield and process improvement, and it is driving innovations in both inspection techniques and wafer test …

Jan 15, 2025 · At the 5nm scale, where chip features push the boundaries of modern manufacturing, reticle inspection is the difference between stellar yields and massive losses.

Dec 13, 2023 · Semiconductor inspection during the production of patterned wafers and ICs (integrated circuits) is important for identifying and minimizing defects. To increase the …

Analytical instruments and methods to ensure the highest quality of raw materials and chemicals used in semiconductor manufacturing processes.

Wafer inspection involves wafer flatness measurements, wafer surface and probe mark inspection, and critical dimension measurement. Wafer inspection also collects data on …