Explore photolithography and lithography tools at the Materials for Opto/Electronics Research and Education (MORE) Center at Case Western Reserve University. Photolithography uses UV sensitive ...
Abstract: Developing an efficient and accurate automated process window analysis method for the lithography process is a challenging small sample size problem due to the difficulty of acquiring ...
Abstract: As the technology node develops toward its physical limit, lithographic hotspot detection has become increasingly important and ever-challenging in the computer-aided design (CAD) flow. In ...
Intel's recruitment of Wei-jen Lo, formerly TSMC's Senior Vice President of Strategy Development, signals an aggressive push by the US IDM to regain process leadership. However, industry veteran Burn ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback